JPH02132050U - - Google Patents
Info
- Publication number
- JPH02132050U JPH02132050U JP4175189U JP4175189U JPH02132050U JP H02132050 U JPH02132050 U JP H02132050U JP 4175189 U JP4175189 U JP 4175189U JP 4175189 U JP4175189 U JP 4175189U JP H02132050 U JPH02132050 U JP H02132050U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vacuum suction
- plate
- plates
- guide body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Registering Or Overturning Sheets (AREA)
- Discharge By Other Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4175189U JPH02132050U (en]) | 1989-04-10 | 1989-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4175189U JPH02132050U (en]) | 1989-04-10 | 1989-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132050U true JPH02132050U (en]) | 1990-11-02 |
Family
ID=31552689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4175189U Pending JPH02132050U (en]) | 1989-04-10 | 1989-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132050U (en]) |
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1989
- 1989-04-10 JP JP4175189U patent/JPH02132050U/ja active Pending